Hardness and assessment of adhesion of monolayer and multilayer nickel thin films electrochemically deposited on silicon substrates with and without the ultrasonic agitation

Jelena S Lamovec; Vesna Jovic; Stevo Jacimovski; Goran Jovanov; Vesna Radojevic; Jovan Setrajcic

doi:10.5937/nabepo24-19682

Jelena S Lamovec Univerzitet u Beogradu, Institut za hemiju, tehnologiju i metalurgiju, Centar za mikroelektronske tehnologije
Vesna Jovic Institute for Chemistry, Technology and Metallurgy - The Microelectronic Technologies Department,University of Belgrade
Stevo Jacimovski The Academy of Criminalistic and Police Studies, Cara Dusana Street 196, 11080 Zemun, Belgrade, Serbia
Goran Jovanov The Academy of Criminalistic and Police Studies, Cara Dusana Street 196, 11080 Zemun, Belgrade, Serbia
Vesna Radojevic Faculty of Technology and Metallurgy,University of Belgrade, 11000 Belgrade, Serbia
Jovan Setrajcic University "Union - Nikola Tesla", Faculty of Sport, Narodnih heroja 30/I, 11070 Belgrade, Serbia

DOI: https://doi.org/10.5937/nabepo24-19682

Sažetak

Composite systems of monolayer and multilayer nickel films electrochemically deposited on single crystal (100)-oriented silicon wafers were fabricated with and without the ultrasonic agitation. The hardness and adhesion behaviour of these composite structures were characterized by Vickers microindentation test. The dependence of composite microhardness and film adhesion on the structure of the film and mixing conditions of electrolyte was analysed. Mathematical models of Chicot-Lesage and Chen-Gao were applied to experimental data in order to obtain the film hardness and adhesion parameter, respectively. It is confirmed that the mechanical properties of nickel films on silicon substrate composite systems can be enhanced by introduction of ultrasound-assisted electrodeposition and by reducing the layer thickness in the film.

Keywords: composite hardness, film adhesion, ultrasound-assisted electrodeposition, multilayer nickel films

Biografija autora

Jelena S Lamovec, Univerzitet u Beogradu, Institut za hemiju, tehnologiju i metalurgiju, Centar za mikroelektronske tehnologije

Viši naučni saradnik, Inženjerstvo materijala, Mikroelektronske tehnologije